Corporate Information

• Message
• Company Profile
• Company History

Product Information

• EB Mask Writer
  • Key Technologies
    • Nano-order speed and high-precision control technologies
    • Nano-order ultra-precision machine technology
    • Tera-order speed and high-capacity information processing technology
  • Development Roadmap
  • List of Awards & Papers
• Mask Inspection System
• Epitaxial Reactor
  • HT2000FD Single Wafer Epitaxial Reactor
  • Core Technology
  • EGV-30GX Vertical Batch Epitaxial Reactor

CSR

• Standards of Conduct
• Environmental Activities

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