Business Details

Electron beam (EB) mask writers

Far in front of our competitors, with a top market share worldwide!

An EB mask writer is utilized to create a set of photomasks, eoch defining a pattern layer in integrated circuit fabrication thot will be transferred onto silicon wafers by the lithography process. As the scale of semiconductor integration increased, EB mask writers were put to practical use in the late 1970s to draw fine-geometry patterns. Now, they serve as a key technology for the manufacture of semiconductor devices. NuFlare offers EB mask writers with unequalled performance that have a near manopoly in the worldwide market.

Mask inspection systems

Mask inspection systems are utilized to detect defects in photomask patterns stepped by electron beam (EB) mask writers to improve the yield of semiconductor devices. With the shrinking process technologies, the circuit patterns drawn on photomasks are becoming increasingly complicated, making mask inspection systems ev more important. In 2006, Nuflare entered the business of mask inspection systems to offer both EB mask writers and inspection systems to our customers. Our mask inspection systems provide reliable inspection as they work on the same data as EB mask writers. Furthermore, our mask inspection systerris integrate multiple functions effectively in order to improve sensitivity and reduce inspection time.

Epitaxial growth systems

Epitaxial growth is a process that forms a layer of monocrystalline material on a silicon wafer along a uniform crystalline direction. An epitaxial growth system is employed to create epitaxial wafers for light-emitting diodes (LEDs) as well as power devices for hybrid and electric vehicle applications. NuFlare has over 30 years of experience in the manufacture and sales of epitaxial growth systems. In 2013, we commercialized a metal organic chemical vapor deposition (MOCVD) system for the manufacture of gallium-nitride-on-silicon (GaN-on-Si) LEDs. In 2014, we released for a CVD system for silicon carbide (SiC) devices. Today, we are recognized worldwide as a manufacturer of high-efficiency and sophisticated epitaxial growth systems.