Mask Inspection System NPI-7000

High Productivity Mask Inspection System

Mask Inspection System NPI-7000

The most advanced high throughput Mask Inspection System "NPI-7000" for hp20nm design rule.

Features

  • 1) 199nm wavelength light source.
  • 2) High speed concurrent Reflection/Transmission inspection within 85 minutes.
  • 3) High sensitivity to enables inspection of the most advanced photomasks.

Key Parameters

Mask size 6inch
Wavelength 199nm
Inspection time 85minutes
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