Company History

1976 December Transfer of semiconductor manufacturing equipment business technology, centered on electronic beam mask writers, from Toshiba Corporation to Toshiba Machine Co., Ltd. (currently NuFlare Technology).
An electronic beam mask writer-related technical support agreement was signed between Toshiba Corporation and Toshiba Machine Co., Ltd. (currently NuFlare Technology), and the development, manufacturing, and ordering of the EBM-105 series writers commenced, based on the collaboration of Toshiba Corporation.
1979 April Electronic beam mask writer won the Nikkan Kogyo Shimbun newspaper's Best 10 New Products Prize*1
(*1 Every year, the Nikkan Kogyo Shimbun newspaper carefully selects and recognizes ten excellent items from among products developed and commercialized by Japanese corporations.)
1984 June Through a joint project with Toshiba Corporation's research laboratory, completed a variable shaped beam-type electronic beam mask writer (EBM-130V), our first model.
1992 June With Toshiba Corporation, jointly developed the HT-2000 (carbon heating-type) high-speed rotating epitaxial growth system. This was Japan's first domestically produced sheet system.
1995 December Received The Prize for the Promotion of the Machine Industry
1998 December Through a joint project with Toshiba Corporation, developed and commercialized a variable shaped beam-type electronic beam mask writer (EBM-3000). Our first commercial model, this was compatible with 180-150nm design rules.
2002 June Developed and commercialized EBM-4000 electron beam mask writer for 65-nm (circuit line) design rules. (Up to this point, Semiconductor Equipment Division of Toshiba Machine Co., Ltd.).
August NuFlare Technology, Inc. took over the entire semiconductor equipment business of Toshiba Machine Co., Ltd. and commenced operations.
December Participated in Semicon Japan 2002 for the first time as NuFlare Technology, Inc.
2003 February Expansion of clean room as manufacturing facilities expanded.
April Development commissioning agreement signed with Toshiba Machine Company, America, the US subsidiary of Toshiba Machine Co., Ltd., and the USA Satellite office established.
November Opened the "Yokohama Satellite" office, an R&D base, in Yokohama. (In October 2004, moved Sales Division to Yokohama Satellite.)
2004 September Developed and commercialized EBM-5000 electron beam mask writer for 65-nm circuit lines.
November In recognition of development of proximity effect compensation technology, awarded the Promotion Foundation for Electrical Science and Engineering Award*2 (Ohm Technology Award), a special prize to commemorate the 90th anniversary of the foundation of Ohmsha, Ltd. (*2 The Promotion Foundation for Electrical Science and Engineering confers this prize on an organization or individual who has achieved excellent results and is expected to achieve still more outstanding results in the future fors an invention, modification, production increase, research, or survey, etc., that has contributed to the advance of Japan's electrical technology or the development of electrical utilities industries, telecommunications, or electronic communications culture.)
2006 March Reception of Intel's "Preferred Quality Supplier"(PQS) Award
April Announcment of EBM-6000
June Mask Inspection Business started
2007 March Started-up Yokohama Operations
April Equity listed on JASDAQ Securities Exchange
October NuFlare Technology headquarters relocate to Shinyokohama, Kouhoku-ku Yokohama-shi Kanagawa.
2009 March Established NFT KOREA,Inc. in Suwon,Korea
2010 April Equity listed on Osaka Securities Exchange JASDAQ Standard due to Osaka Securities Exchange merged with Jasdaq Securities Exchange, Inc.
2013 February NuFlare Awarded The 59th Okochi Memorial Grand Production Prize
July Equity listed on Tokyo Stock Exchange JASDAQ Standard due to Tokyo Stock Exchange merged with Osaka Securities Exchange.
October NuFlare Technology headquarters relocate to Shinsugita, isogo-ku Yokohama-shi Kanagawa.
2014 January Established NuFlare Technology America, Inc.
2015 July Won the Incentive Award for Safety Award by Minister of Health, Labour and Welfare
2020 March Delisted from Tokyo Stock Exchange as of March 30,2020
April Toshiba Electronic Devices & Storage Corporation acquired 100% shares of NuFlare Technology, Inc. as a subsidiary company.