Tera-order speed and high-capacity information processing technology With the scaling of semiconductors, processor and memory performance has improved dramatically and computer processing power has increased exponentially. As semiconductor integration precision improves, the circuit pattern writing data handled by electron beam mask writers is becoming enormous. Another factor in the burgeoning amount of data being processed is compensatory information to prevent mutual interference among the labyrinths of patterns. When generating writing data from LSI circuit pattern data, the volume of information can reach the terabyte level (tera = 1,000,000,000,000). NuFlare Technology uses cutting-edge processors to parallel process large volumes of terabyte-class data, and we are developing and implementing high-speed computing technologies.
The volume of figure data needed to describe the circuit patterns is comparable to the data volume of the latest HDD. The electron beam deflection controls can receive all the figure data without a single miss of data order, within just a couple of hours. This means that the electron beam mask writer is required to have the ultimate reliability technology that enables writing one trillion figures without a single error. In the future, data volumes are expected to increase explosively, and we are continuing to develop toward still higher processing speeds.