Key Technologies

From nano to tera

Electron beam mask writers are systems based on technologies from a number of diverse areas, including physics, chemistry, electrical engineering, mechanical engineering, control engineering, information processing engineering, and metrology.

Electron beam mask writers are a composite of technologies where various leading-edge specialties merge. These range from minute geometry, typified by nanotechnology (at the scale of one billion to one), to technology for processing enormous amounts of data on the "tera" (one trillion) scale. Driven by a commitment to challenge new frontiers and inspired by the slogan "endlessly challenging," we are working to realize our aspirations and contribute to the advancement of the semiconductor industry, our society, and humankind.